Bonded Structures for Package and Substrate

ABSTRACT

The embodiments described provide elongated bonded structures near edges of packaged structures free of solder wetting on sides of copper posts substantially facing the center of the packaged structures. Solder wetting occurs on other sides of copper posts of these bonded structures. The elongated bonded structures are arranged in different arrangements and reduce the chance of shorting between neighboring bonded structures. In addition, the elongated bonded structures improve the reliability performance.

This application claims the benefit of the following provisionally filedU.S. patent application: Application Ser. No. 61/684,565, filed Aug. 17,2012, and entitled “Bonded Structures for Package and Substrate,” whichapplication is hereby incorporated herein by reference.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment. Semiconductor devices are typically fabricated bysequentially depositing insulating or dielectric layers, conductivelayers, and semi-conductive layers of materials over a semiconductorsubstrate, and patterning the various material layers using lithographyto form circuit components and elements thereon.

The semiconductor industry continues to improve the integration densityof various electronic components (e.g., transistors, diodes, resistors,capacitors, etc.) by continual reductions in minimum feature size, whichallow more components to be integrated into a given area. These smallerelectronic components also require smaller packages that utilize lessareas or smaller heights than packages of the past, in someapplications.

Thus, new packaging technologies have begun to be developed. Theserelatively new types of packaging technologies for semiconductor devicesface manufacturing challenges.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present disclosure, and someadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1A is a perspective view of a package structure in accordance withsome embodiments;

FIG. 1B illustrates a cross-sectional view of a portion of package, inaccordance with some embodiments;

FIG. 1C illustrates a cross-sectional view of a portion of a substrate,in accordance with some embodiments;

FIG. 1D shows a bonded structure, in accordance with some embodiments;

FIG. 2A shows a bottom view of package with a number of bump structures,in accordance with some embodiments;

FIG. 2B shows enlarged top view of 4 neighboring bonded structures, inaccordance with some embodiments;

FIG. 2C shows a cross-sectional view of two neighboring bondedstructures, in accordance with some embodiments;

FIG. 2D shows another cross-sectional view of two neighboring bondedstructures, in accordance with some embodiments;

FIG. 3A shows a bottom view of package with a number of bump structures,in accordance with some embodiments;

FIG. 3B shows a top view of four neighboring bonded structures, inaccordance with some embodiments;

FIG. 3C shows a cross-sectional view of two neighboring bondedstructures, in accordance with some embodiments;

FIG. 3D shows a cross-sectional view of two neighboring bondedstructures, in accordance with some embodiments;

FIG. 4 shows an arrangement of groups of bonded structures, inaccordance with some embodiments; and

FIG. 5 shows a top view of four neighboring bonded structures, inaccordance with some embodiments.

Corresponding numerals and symbols in the different figures generallyrefer to corresponding parts unless otherwise indicated. The figures aredrawn to clearly illustrate the relevant aspects of the embodiments andare not necessarily drawn to scale.

DETAILED DESCRIPTION

The making and using of the embodiments of the present disclosure arediscussed in detail below. It should be appreciated, however, that thepresent disclosure provides many applicable inventive concepts that canbe embodied in a wide variety of specific contexts. The specificembodiments discussed are illustrative and do not limit the scope of thedisclosure.

FIG. 1A is a perspective view of a package structure 100 including apackage 110 bonded to a substrate (or bonding substrate) 120, which isfurther bonded to another substrate 130 in accordance with someembodiments. Package 110 includes at least a semiconductor die (notshown). The semiconductor die includes a semiconductor substrate asemployed in a semiconductor integrated circuit fabrication, andintegrated circuits may be formed therein and/or thereupon. Thesemiconductor substrate refers to any construction comprisingsemiconductor materials, including, but not limited to, bulk silicon, asemiconductor wafer, a silicon-on-insulator (SOI) substrate, or asilicon germanium substrate. Other semiconductor materials includinggroup III, group IV, and group V elements may also be used. Thesemiconductor substrate may further comprise a plurality of isolationfeatures (not shown), such as shallow trench isolation (STI) features orlocal oxidation of silicon (LOCOS) features. The isolation features maydefine and isolate the various microelectronic elements. Examples of thevarious microelectronic elements that may be formed in the semiconductorsubstrate include transistors (e.g., metal oxide semiconductor fieldeffect transistors (MOSFET), complementary metal oxide semiconductor(CMOS) transistors, bipolar junction transistors (BJT), high voltagetransistors, high frequency transistors, p-channel and/or n-channelfield effect transistors (PFETs/NFETs), etc.); resistors; diodes;capacitors; inductors; fuses; and other suitable elements. Variousprocesses are performed to form the various microelectronic elementsincluding deposition, etching, implantation, photolithography,annealing, and/or other suitable processes. The microelectronic elementsare interconnected to form the integrated circuit device, such as alogic device, memory device (e.g., SRAM), RF device, input/output (I/O)device, system-on-chip (SoC) device, combinations thereof, and othersuitable types of devices.

Substrate 120 includes a portion of semiconductor wafer, in accordancewith some embodiments. Substrate 120 may include silicon, galliumarsenide, silicon-on-insulator (“SOI”) or other similar materials. Insome embodiments, substrate 120 also includes passive devices such asresistors, capacitors, inductors and the like, or active devices such astransistors. In some embodiments, substrate 120 includes additionalintegrated circuits. Substrate 120 may further include through substratevias (TSVs) and may be an interposer. Substrate 120 may be a packageddie, in accordance with some embodiments. In some embodiments, substrate130 includes bismaleimide triazine (BT) resin, FR-4 (a compositematerial composed of woven fiberglass cloth with an epoxy resin binderthat is flame resistant), ceramic, glass, plastic, tape, film, or othersupporting materials that may carry the conductive pads or lands neededto receive conductive terminals.

Substrate 130 may be made of materials that are used to make substrate120. In some embodiments, substrate 130 is a multiple-layer circuitboard. Package 110 is bonded to substrate 120 via connectors 115, andsubstrate 120 is bonded to substrate 130 via connectors 125.

FIGS. 1B and 1C illustrate a cross-sectional view of a portion ofpackage 110 and a portion of substrate 120 near bonding structuresbefore they are bonded together, in accordance with some embodiments.FIG. 1B shows that Package 110 includes a substrate 102 with devices(not shown) with interconnect formed therein. As mentioned above,substrate 102 may include a semiconductor substrate such as a siliconsubstrate, although it may include other semiconductor materials.Interconnect structure 104, which includes metal lines and vias 106formed therein and connected to the semiconductor devices, is formed onsubstrate 102. Metal lines and vias 106 may be formed of copper orcopper alloys, and may be formed using damascene processes. Interconnectstructure 104 may include a commonly known inter-layer dielectric (ILD,not shown) and inter-metal dielectrics (IMDs) 108. IMDs 108 may compriselow-k dielectric materials, and may have dielectric constants (k values)lower than about 3.0. The low-k dielectric materials may also be extremelow-k dielectric materials having k values lower than about 2.5.

Package 110 includes under-bump metallurgy (UBM) layer 111 and a copperpost 112 on UBM layer 111. Throughout the description, the copper post112 is also referred to as a copper-containing bump or metal bump.Although copper post 112 is used as an example in the description hereand below, other types of metal bumps, such as solder bumps, may also beused in place of copper post 112. A solder layer 113 is formed over thecopper post 112, in accordance with some embodiments. In someembodiments, a solder layer is not formed over the copper post 112. Insome embodiments, a metal barrier layer (not shown) is formed betweencopper post 112 and solder layer 113 to prevent the formation ofinter-metallic compound (IMC) formed by mixing of solder and copper. Insome embodiments, the barrier layer is made of Ti. The metal barrierlayer is not formed in some embodiments. The UBM layer 111 is disposedon a metal pad 105, which is connected to the interconnect structure inpackage 110. Between the interconnect structure 104 and a portion of theUBM layer 111 not contacting the metal pad 105, there is a passivationlayer 107. In some embodiments, the passivation layer 107 is made ofpolyimide. In some embodiments, passivation layer 107 includes more thanone sub-layer. Metal pad 105 may be connected to input/output structuresor other conductive structures on the same metal level through metallines. In some embodiments, metal pad 105 includes copper and can bepure copper or a copper alloy. In some alternative embodiments, otherconductive materials are used instead of copper. For example, metal pad105 may include aluminum, aluminum alloy, gold, or gold alloy, etc.

In some embodiments, UBM layer 111 includes a diffusion barrier layerand a seed layer. The diffusion barrier layer may be formed of tantalumnitride, although it may also be formed of other materials such astitanium nitride, tantalum, titanium, or the like. The seed layer may bea copper seed layer formed on the diffusion barrier layer. The copperseed layer may be formed of copper or one of copper alloys that includesilver, chromium, nickel, tin, gold, and combinations thereof. In someembodiments, the UBM layer 111 includes a diffusion barrier layer formedof Ti and a seed layer formed of Cu. The UBM layer 111, copper post 112and solder layer 113 form a bump structure 114, in accordance with someembodiments. In some other embodiments, copper post 112 can be replacedwith another type of conductive materials, such as aluminum, gold,silver, alloy thereof, etc.

FIG. 1C shows a substrate 120 including a base substrate 150, inaccordance with some embodiments. Substrate 120 includes metal lines andvias connecting metal features on opposite sides of substrate 120. Thevias of substrate 120 may include plating through holes (PTHs), whichare filled with conductive metal(s). Substrate 120 also includes a metalpad 210, which is partially covered by a passivation layer 207. In someembodiments, the passivation layer 207 is a solder resist, which can bepatterned by lithography without another photoresist layer. Metal pad210 may be electrically connected to a ball grid array (BGA) ball (notshown) on the bottom side of substrate 120 through metal lines and vias(not shown). The metal lines and vias are formed in dielectric layers,which may be formed over a semiconductor layer.

Metal pad 210 is formed over a top dielectric layer. Metal pad 210 maybe formed of substantially pure copper, aluminum copper, or othermetallic materials such as tungsten, nickel, palladium, gold, and/oralloys thereof. Metal pad 210 is partially covered by a passivationlayer 207. A solder layer 220 is formed over the metal pad 210 to fillopening formed in the passivation layer 107 to bonding with the solderlayer 113 or copper post 112 (if there is no solder layer 113) ofpackage 110. In some embodiments, the opening formed in the passivationlayer 107 is called a solder resist opening (SRO) 117. Metal pad 210 maybe connected to input/output structures or other conductive structureson the same metal level through metal lines. In some embodiments, metalpad 210 includes copper and can be pure copper or a copper alloy. Insome alternative embodiments, other conductive materials are usedinstead of copper. For example, metal pad 210 may include aluminum,aluminum alloy, gold, or gold alloy, etc. Details of an exemplarymechanism for forming substrate 120 is described in U.S. patentapplication Ser. No. 12/852,196, titled “Flip Chip Substrate PackageAssembly and Process for Making Same” (Attorney Docket No.TSMC2010-0271), and filed on Aug. 6, 2010, which is incorporated byreference herein for its entirety.

To bond package 110 to substrate 120, package 110 is pressed againstsubstrate 120 with bump structures 114 aligned with solder layer 220over SROs 117. A reflow process is then applied to melt the solder layer113 on bump structures 114 with solder layer 220. FIG. 1D shows a bondedstructure (or bonding structure) 115 after solder layer 113 is bonded tosolder layer 220, in accordance with some embodiments. FIG. 1D showsthat the combined solder layer 220′ extends beyond the boundary ofcopper post 112, in accordance with some embodiments. Sometimes, aportion of solder layer 220′ could creep along and cover a portion ofthe side walls of copper posts 114, which is called sidewall wetting,shown by the dotted lines 221.

FIG. 2A shows a bottom view of package 110 with a number of bumpstructures 114, in accordance with some embodiments. FIG. 2A shows thatbump structures 114 have circular cross-sectional views. In addition,bump structures 114 in the central region (or region I) have more spacebetween them than bump structures 114 in the edge region (or region II).The pitch of bumps structures 114 in region I is larger than the pitchof bumps in region II. As described above, package 110 is bonded tosubstrate 120. There are SROs 117 on substrate 120, which are filledwith solder layer 220, arranged in a pattern matching the pattern ofbump structures 114 on package 120.

Due to different coefficients of thermal expansion (CTE) betweenmaterials in package 110 and substrate 120, their relative positions canshift after thermal treatment, such as reflow. For example, package 110include silicon substrate and has an overall CTE about 2-3 ppm/° C.,which is lower than the overall CTE of substrate 120, which is about 17ppm/° C. After thermal treatment, substrate 120 would expand more thanpackage 110 both horizontally and vertically, which causes the shiftingof their relative positions. The shifting of their relative positions ismost prominent at the edges than centers of package 110 (C_(P)) andsubstrate 120. Shifting of their relative positions is minimal near thecenter of the bonded package (110/120).

FIG. 2B shows enlarged top view of neighboring bonded structures 115,B₁, B₂, B₃, and B₄, near the edge of the bonded package (110/120), inaccordance with some embodiments. The solid circles in FIG. 2B areoutlines of copper posts 112 and the dotted circles are outlines ofsolder layer 220′. The copper posts 112 associated with bondedstructures 115, B₁, B₂, B₃, and B₄, are shown as b₁, b₂, b₃, and b₄respectively in FIG. 2A. The circles marked by “+” signs are outlines ofSROs 117. In the embodiment shown in FIG. 2B, the diameter of SROs 117is about the same as the diameter of copper posts 112. However, thediameter of SROs 117 could be larger or smaller than the diameter ofcopper posts 112. FIG. 2B shows that the pitch of the copper posts 112(and SROs 117) is P and the space between them is S. In someembodiments, P is equal to or greater than about 40 μm. In someembodiments, P is in a range from 40 μm to about 200 μm. In someembodiments, S is equal to or greater than about 20 μm. In someembodiments, S is in a range from 20 μm to about 150 μm.

Due to higher CTE of substrate 120 in comparison to package 110, edgesof substrate 120 shifted outward more than the edges of package 110.FIG. 2B shows that SROs 117 have shifted more towards edges of thebonded package (110/120) than copper posts 112 after thermal treatment(or reflow). Prior to thermal treatment, the solid outlines of copperposts 112 should substantially match (or overlap) the outlines (markedby “+” signs) of SROs 117 with their centers substantially overlapping.Due to shifting of the relative positions of copper posts 112 andcorresponding SROs 117, the solder layer 220′ between them is alsoshifted towards the edges. FIG. 2C shows a cross-sectional view ofbonded structures 115, B₁ and B₃, cut along an imaginary line II, inaccordance with some embodiments. FIG. 2C shows that the SROs 117 of B₁and B₃ are shifted more towards the edge than copper posts 112 of copperposts 112 on package 110. Due to the shifting, the surface regions,F_(C), of copper posts 112 facing center of bonded package are notwetted by solder layer 220′. In contrast, the surface regions, F_(E), ofcopper posts 112 facing the edge, are wetted by solder layer 220′. FIG.2C also shows that the edges, S_(E), of copper post 112 extend beyondthe edges, R_(E), of SROs 117. As a result, the distance between bondedstructures 115, B₁ and B₃, is shorted to S_(V), which is shorter than S.

FIG. 2D shows a cross-sectional view of bonded structures 115, B₁ andB₂, cut along an imaginary line JJ, in accordance with some embodiments.FIG. 2D shows that the protruding solder layer 220′ between bondedstructures 115, B₁ and B₂, shortens the space between them to S_(H).Sometimes, the solder layer 220′ between bonded structures 115, B₁ andB₂, is shorted to each other, which lowers the yield of the packagedstructure.

FIG. 3A shows a bottom view of package 110′ with a number of bumpstructures 114′, in accordance with some embodiments. FIG. 3A shows thatbump structures 114′ have elongated cross sections, which could beshaped in race tracks, ovals, etc. FIG. 3A show that the axes, such asaxes 301, 302, and 303, of the bump structures 114′ are substantiallypointing toward the center “C” of package 110′. The SROs of a substrate(not shown), which is similar to substrate 120, are also designed tohave outlines and orientations matching the bump structures 114′, whichwould bond with the solder layer filling the SROs. Such placement of theaxes of the bump structures 114′ and SROs on the substrate substantiallypointing to the center “C” is designed to reduce stress caused by thethermal cycle(s) during bonding process. The thermal cycle(s) wouldcause the package and the substrate to expand outward in all directionsfrom the centers of the package and the substrate.

FIG. 3B shows a top view of 4 neighboring bonded structures 115′,B_(N1), B_(N2), B_(N3), and B_(N4), in accordance with some embodiments.The bump structures 114′, b_(N1), b_(N2), b_(N3), and b_(N4) in FIG. 3Acorrelate to bonded structures 115′, B_(N1), B_(N2), B_(N3), and B_(N4)respectively. FIG. 3B shows the outlines of copper posts 112′, theoutlines of SROs 117′ with “+” signs, and also the dotted outlines ofsolder layers 220′ of these bonded structures 115′. Prior to thermalcycle(s), the outlines of bonded structures 115′ substantially match (oroverlap) with the outlines of SRO 117′. Due to difference in CTEsbetween package 110′ and substrate 120′, the edges of substrate 120′shifted more outward than the edges of package 110′. Therefore, theoutlines of SRO 117′ are shifted more toward the edge(s) than theoutlines of copper posts 112′, especially for bond structures 115′ nearthe edge, such as B_(N1), B_(N2), B_(N3), and B_(N4). FIG. 3B shows thatthe width of copper posts 112′ is W and the length is L. L is largerthan W. In some embodiments, L/W is in a range from about 1.1 to about2.0. In some embodiments, L/W is in a range from about 1.2 to about 1.5.The copper posts 112′ are shaped in race tracks with a half circle oneach end. Due to the difference in relative shifting of the copper posts112′ and SROs 117′, the lengths of copper post sidewalls that are wetted(by solder layer 220′) are equal to or less than about L-W/2, inaccordance with some embodiments. The solder 220′, which is a mixture ofsolder layer 220 filling a SRO 117′ and a solder layer 113′ of a bumpstructure 114′, is pulled toward the edge of the package structure110′/120′.

The elongated cross-sectional views of copper posts 112′ and SROs 117shown in FIG. 3B are shaped like race tracks. However, other types ofelongated cross-sectional views are also possible, such as ovals,rounded rectangles, etc.

FIG. 3C shows a cross-sectional view of bonded structures 115′ B_(N3)and B_(N1) cut along an imaginary line IT, in accordance with someembodiments. FIG. 3C shows that the SROs 117′ of B_(N1) and B_(N3) areshifted more towards the edge than copper posts 114′ of bump structure114′ on package 110′. Due to the shifting, the front surface regions,F_(c)′, of copper posts 112′ facing center of bonded package are notwetted by solder layer 220′. In contrast, the back surface regions,F_(E)′, of copper posts 112′ facing the edge, are wetted by solder layer220′. FIG. 3C also shows that the edges, S_(E)′, of solder layer 220′extend beyond the edges, R_(E)′, of SROs 117. In addition, the distancebetween bonded structures 115′, B_(N1) and B_(N3), is shorted to S_(y)′.

FIG. 3D shows a cross-sectional view of bonded structures 115′, B_(N1)and B_(N2), cut along an imaginary line J′J′, in accordance with someembodiments. FIG. 3D shows that the protruding solder layer 220′ betweenbonded structures 115′, B_(N1) and B_(N2), shortens the space betweenthem to S_(H)′.

FIG. 3B shows that the 4 neighboring bonded structures 115′ with copperposts 112′ having a pitch P_(W) and a space S_(W) measured along thewidths of these structures. In addition, the 4 neighboring bondedstructures 115′ have copper posts 112′ with a pitch P_(L) and a spaceS_(L) measured along the width of these structures. Due to theprotruding solder layer 220′, with space between structure B_(N1) andB_(N2) is reduced to S_(H)′. If pitch P_(W) is maintained to be equal toP of FIG. 2B, space S_(W) is larger than S of FIG. 2B. As a result,space S_(H)′ is larger than S_(H) and the neighboring bonded structures115′, such as B_(N1) and B_(N2), are less likely to short to each other.

Similarly, due to the protruding solder layer 220′, with space betweenstructure B_(N1) and B_(N3) is reduced to S_(V)′. If pitch P_(L) ismaintained to be equal to P of FIG. 2B, space S_(L) is smaller than S ofFIG. 2B. However, since the protrusion of the solder layer 220′ onlyoccurs on the edge-sides of copper posts, not the sides pointing awayfrom the respective edge, the space S_(V)′ after bonding process isabout equal to or slightly smaller than S_(V) described above. Shortingbetween B_(N1) and B_(N3) or between B_(N2) and B_(N4) is not a concern.In some embodiments, P_(L) and P_(W) are equal to or greater than about40 μm. In some embodiments, P_(L) and P_(W) are in a range from 40 μm toabout 200 μm. In some embodiments S_(L) and S_(W) are equal to orgreater than about 20 μm. In some embodiments, S_(L) and S_(W) are in arange from 20 μm to about 150 μm. In some embodiments, the ratio L/W islarger than 1, such as great than about 1.05. In some embodiments, L/Wis in a range from about 1.1 to about 1.5.

FIGS. 3B-3D described above involve elongated SRO 117′. However,elongated gated copper posts 112′ could be bonded to SRO 117 (roundshape). The embodiments shown in FIGS. 3A-3D involve placing neighboringbonded structures 115′ within a group to be aligned with parallel axes,such as axes Y₁ and Y₂. There are many groups of bonded structures 115′on packaged structure (110′/120′). FIG. 4 shows an arrangement of groupsof bonded structures, in accordance with some embodiments. The bondedstructures are divided into 20 groups, as shown in FIG. 4. The elongatedbonded structures in each group have axes pointed toward substantiallytoward the center C of the packaged structure 400. The axes of bondedstructures in each group are substantially parallel. The 20 groups inFIG. 4 is merely an example. Other arrangements of groups are alsopossible.

In addition, FIG. 3B shows that the ends (or tips), such as T₁ and T₂,of bonded structures 115′ are aligned to have a line X₁ connecting T₁and T₂ substantially perpendicular (or at 90°) to axes Y₁ and Y₂. FIG.3B shows that the widest areas W_(N4) and W_(N3) of bonded structuresB_(N4) and B_(N3) respectively are substantially aligned. The widthsW_(W) of the widest areas is larger than width W due to protrudingsolder layer 220′.

However, the line connecting the ends of the bonded structures 115′could be at an angle from the axes. FIG. 5 shows a top view of bondedstructures 115″, B_(M1), B_(M2), B_(M3), and B_(M4), in accordance withsome embodiments. B_(M3) has an axis Y1′. B_(M2) and B_(M4) are alignedto have an axis Y₂′. Y₁′ and Y₂′ are substantially parallel. A line X₁′connecting ends T1′ and T2′, of B_(M3) and B_(M4) respectively, is at anangle α, from Y₂′ as shown in FIG. 5. In some embodiments, the angle αis less than 90°. In some embodiments, the angle α is in a range fromabout 30° to about 60°. When angle α is less than 90°, the widest areaof a bonded structure is not aligned with that of a neighboring bondedstructure. FIG. 5 shows that the widest area W_(M4) of B_(M4) is notaligned with the widest area W_(M3) of B_(M3) due to the angle α notbeing 90°. In contrast, the widest areas of bonded structures B_(N3) andB_(N4) of FIG. 3B are aligned. Such mis-alignment of widest areas ofneighboring bonded structures allows the pitch P_(M) of bondedstructures of FIG. 5 to be lower than the pitch P_(W) of FIG. 3B. Insome embodiments, the angle α is about 45°. In some embodiments, thepitch P_(M) is equal to or greater than about 20 mm. In someembodiments, P_(M) is in a range from about 20 μm to about 150 μm. Insome embodiments, the space between neighboring bumps S_(M) is in arange from about 10 μm to about 130 μm. Therefore, the bonded structuresare aligned with angle α less than 90°, in accordance with someembodiments.

In addition to expanding the space between neighboring bonded structuresto reduce the chance of shorting, elongated bonded structures arrangedwith axes substantially pointed to the center of packaged structuresdescribed above also reduce interfacial delamination. The bondingprocess could exert significant amount of stress on the bondedstructures. To reduce the stress exerted on the bonded structures, anunderfill is often applied between the space between package, such aspackage 110 or 110′, and substrate, such as substrate 120 or 120′, afterthey are bonded to support bonded structures. The underfill is made ofpolymers, such as resin, epoxy, or other suitable materials. In someembodiments, the underfill also includes fillers, such as silica, toadjust the mechanical strength of the underfill. The additional spacebetween bonded structures allows the underfill to fill in the space tosupport the bonded structures. Further, prior to applying the underfill,the residual flux used to cover the solder layer, such as layer 113 and220, on package or substrate, that remains on the package or substrateafter they are bonded together is removed by a plasma cleaning process.The additional space between bonded structures also improves the fluxcleaning process. As a result, the underfill applied can have bettercontact with the surface of the bonded structures, the package and thesubstrate. Reliability test results show fewer interfacial delaminationfailures for bonded structures with elongated bump structures and SROsdescribed above in FIGS. 3A-3D and 5 compared to round structuresdescribed in FIGS. 2A-2D. Therefore, there are clear advantages ofhaving bonded structures with elongated bump structures and SROs.

The embodiments described above provide elongated bonded structures nearedges of packaged structures free of solder wetting on sides of copperposts facing substantially facing the center of the packaged structures.Solder wetting occurs on other sides of copper posts of these bondedstructures. The elongated bonded structures are arranged in differentarrangements and reduce the chance of shorting between neighboringbonded structures. In addition, the elongated bonded structures improvethe reliability performance.

In some embodiments, a package structure is provided. The packagestructure includes a die package with a connecting structure including acopper post. The copper post has a first elongated cross-sectional area.The package structure also includes a substrate with a solder layerfilling an opening over a metal pad, and the solder layer makes directcontact with the metal pad. The opening has a second elongatedcross-sectional area, and the copper post is bonded to the solder layerto form a bonded structure. A surface of the copper post facing a centerof the package structure is not wetted by the solder layer, and surfaceof the copper post not facing the center of the center is wetted by thesolder layer.

In some embodiments, a package structure is provided. The packagestructure includes a plurality of bonded structures, and each of theplurality of bonded structures includes a copper post and a solderlayer. The copper post is bonded to a package and the solder layer isbonded to metal pad of a substrate, and the plurality of bondedstructures are divided into a plurality of groups. bonded structures ineach of the plurality of groups have their axes parallel to one another,and their axes point substantially to a center of the package structure.

In yet some embodiments, a package structure is provided. The packagestructure includes a die package with a plurality of copper posts, andeach of the copper post has a first elongated cross-sectional area. Thepackage structure includes a substrate with a solder layer filling aplurality of openings over a plurality of metal pads, and the solderlayer makes direct contact with the plurality of metal pads. Each of theopenings has a second elongated cross-sectional area, and the pluralityof copper posts are bonded to the solder layer to form a plurality ofbonded structures. Edges of the plurality copper posts facing a centerof the package structure are not wetted by the solder layer, and lengthsof the plurality of copper posts wetted by the solder layer are lessthan the lengths of the plurality of copper posts.

Although embodiments of the present disclosure and their advantages havebeen described in detail, it should be understood that various changes,substitutions and alterations can be made herein without departing fromthe spirit and scope of the disclosure as defined by the appendedclaims. For example, it will be readily understood by those skilled inthe art that many of the features, functions, processes, and materialsdescribed herein may be varied while remaining within the scope of thepresent disclosure. Moreover, the scope of the present application isnot intended to be limited to the particular embodiments of the process,machine, manufacture, composition of matter, means, methods and stepsdescribed in the specification. As one of ordinary skill in the art willreadily appreciate from the disclosure of the present disclosure,processes, machines, manufacture, compositions of matter, means,methods, or steps, presently existing or later to be developed, thatperform substantially the same function or achieve substantially thesame result as the corresponding embodiments described herein may beutilized according to the present disclosure. Accordingly, the appendedclaims are intended to include within their scope such processes,machines, manufacture, compositions of matter, means, methods, or steps.

1. A package structure, comprising: a die package with a connectingstructure including a copper post, wherein the copper post has a firstelongated cross-sectional area; and a substrate with a solder layerfilling an opening over a metal pad, wherein the solder layer makesdirect contact with the metal pad, wherein the copper post is bonded tothe solder layer to form a bonded structure; wherein a surface of thecopper post facing a center of the package structure is not wetted bythe solder layer, and wherein a surface of the copper post not facingthe center of the package structure is wetted by the solder layer. 2.The package structure of claim 1, wherein a length of the copper postwetted by the solder layer is less than the length of the copper post byat least half a width of the copper post.
 3. The package structure ofclaim 1, wherein the opening has a second elongated cross-sectionalarea, wherein a first axis of the first elongated cross-sectional areais aligned with a second axis of the second elongated cross-sectionalarea.
 4. The package structure of claim 1, wherein an axis of the bondedstructure points substantially to the center of the package structure.5. The package structure of claim 4, comprising: another bondedstructure similar to the bonded structure, wherein an axis of theanother bonded structure is parallel to the axis of the bondedstructure, and wherein the another bonded structure is adjacent to thebonded structure, and wherein tips of the bonded structure and theanother bonded structure facing the center form a line, wherein the lineis perpendicular to the axis of the bonded structure.
 6. The packagestructure of claim 4, comprising: another bonded structure similar tothe bonded structure, wherein an axis of the another bonded structure isparallel to the axis of the bonded structure, and wherein the anotherbonded structure is adjacent to the bonded structure, and wherein tipsof the bonded structure and the another bonded structures facing thecenter form a line, wherein the line forms an angle with the axis of thebonded structure, wherein the angle is in a range from about 30° toabout 60°.
 7. The package structure of claim 6, wherein the angle isabout 45°.
 8. The package structure of claim 1, wherein a ratio of alength to a width of the first elongated cross-sectional area is in arange from about 1.1 to about 1.5.
 9. A package structure, comprising: aplurality of bonded structures, wherein each of the plurality of bondedstructures includes a copper post and a solder layer, wherein the copperpost is bonded to a package and the solder layer is bonded to a metalpad of a substrate, wherein the plurality of bonded structures each havean elongated shape and are divided into a plurality of groups, whereinbonded structures in each of the plurality of groups have their axesparallel to one another, wherein their axes point substantially to acenter of the package structure, wherein a first side of a first copperpost is wetted by the solder layer and a second side of the first copperpost is not wetted by the solder layer, the first side facing towardsthe center of the package structure and the second side facing away fromthe center of the package structure.
 10. The package structure of claim9, wherein there are no bonded structures in at least a portion of thepackage structure.
 11. The package structure of claim 10, wherein theportion of the package structure without the bonded structures isbetween a center region and edge regions of the package structure. 12.The package structure of claim 9, wherein a pitch of the plurality ofbonded structures is in a range from about 20 μm to about 200 μm. 13.The package structure of claim 9, wherein a space of two neighboringbonded structures of the plurality of bonded structures is in a rangefrom about 10 μm to about 150 μm.
 14. A package structure, comprising: adie package with a plurality of copper posts, wherein each of the copperpost has a first elongated cross-sectional area; and a substrate with asolder layer filling a plurality of openings over a plurality of metalpads, wherein the solder layer makes direct contact with the pluralityof metal pads, wherein each of the openings has a second elongatedcross-sectional area, wherein the plurality of copper posts are bondedto the solder layer to form a plurality of bonded structures; whereinedges of the plurality of copper posts facing a center of the packagestructure are not wetted by the solder layer, and wherein lengths of theplurality of copper posts wetted by the solder layer are less than thelengths of the plurality of copper posts.
 15. The package structure ofclaim 14, wherein each of the plurality of bonded structures has an axispointing substantially to the center of the package structure.
 16. Thepackage structure of claim 15, wherein two adjacent bonded structures ofthe plurality of bonded structures have axes in parallel.
 17. Thepackage structure of claim 16, wherein tips of two adjacent bondedstructures of the plurality of bonded structures form a line, whereinthe line is perpendicular to the axes of the adjacent bonded structures.18. The package structure of claim 14, wherein tips of two adjacentbonded structures of the plurality of bonded structures form a line,wherein the line forms an angle with an axis of one of the plurality ofbonded structures, wherein the angle is in a range from about 30° toabout 60°.
 19. The package structure of claim 18, wherein the angle isabout 45°.
 20. The package structure of claim 14, wherein a ratio of alength to a width of the first elongated cross-sectional area is in arange from about 1.1 to about 1.5.